VLSI electronics : microstructure science


名称	VLSI electronics : microstructure science

索引号	TN47/E9015
分类号	TN47 TN47(大规模集成电路、超大规模集成电路) TN4(微电子学、集成电路（IC）) TN(无线电电子学、电信技术) T(工业技术)
作者
出版社	New York : Academic Press, 1981-1993.
ISBN
页数	v. <1-24 > : ill. ; 24 cm.
价格
标签
简介
注解	Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21-24> : San Diego : Academic Press. Vol. 6 edited by Norman G. Einspruch, Graydon B. Larrabee; v. 11 edited by Norman G. Einspruch, William R. Wisseman; v. 12 edited by Norman G. Einspruch, Howard Huff; v. 14 edited by Norman G. Einspruch. 附註 Includes bibliographical references and indexes. 內容 v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.