Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

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名称	Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

索引号	O46-51/E901
分类号	O46-51 O46(真空电子学(电子物理学)) O4(物理学) O(数理科学和化学)
作者	Ion Implantation School (1982 : Berchtesgaden、 Germany)、Ryssel、 Heiner、 1941-、Glawischnig、 H. (Hans)、 1939-、International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden、 Germany)、
出版社	Berlin ; New York : Springer-Verlag, 1982.
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页数	xii, 372 p. : ill. ; 24 cm.
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